Systems and methods for wafer pod calibration
US10541162B2 · kind B2 · utility
3Cited by
2References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 2018 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Jan 29, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S901/47
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an embodiment, a system includes: a wafer pod defining a cavity configured to store a wafer at a wafer position; calibration sensors within the cavity, each calibration sensor configured to produce calibration data indicating that the wafer is at a respective part of the cavity; and a processor configured to determine whether the wafer is positioned at the wafer position within the cavity based on the calibration data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.