Micromechanical component

US10544033B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rudy Eid · Stuttgart, DE
• Stefano Cardanobile · Reutlingen, DE

Key dates

• Filing date: May 10, 2017
• Grant date: Jan 28, 2020
• Expiry date: May 10, 2037

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0163
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component includes a substrate that extends along a main extension plane of the micromechanical component, the micromechanical component including a drive mass which is suspended on the substrate via a drive spring of the micromechanical component so as to be able to move relative to the substrate, the micromechanical component including a test mass that is movably suspended relative to the drive mass, the drive spring being disposed in such a way that the drive mass and/or the test mass surround(s) the drive spring at least in part essentially parallel to the main extension plane.