Methods for depositing a measured amount of a species in a sealed cavity
US10544039B2 · kind B2 · utility
2Cited by
26References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2017 |
| Grant date | Jan 28, 2020 |
| Priority date | — |
| Expiry date | Sep 8, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.