Inspection apparatus
US10545101B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 2017 |
| Grant date | Jan 28, 2020 |
| Priority date | — |
| Expiry date | Nov 7, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/646
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus includes a feed-in preparation chamber, an imaging chamber, and a feed-out preparation chamber. Each preparation chamber includes a feed-in unit that receives an inspection object through a first opening, a traverser that translates the received object to a second opening in a direction different from the receiving direction of the object, and a feed-out unit that moves the object in a direction different from a moving direction of the traverser and discharges the object through the second opening. The imaging chamber includes an imaging unit that images the object fed from the feed-in preparation chamber. The traverser includes a mount for the object, and a shield that moves together with the mount and prevents radioactive rays entering one of the first and second openings and propagating in the moving direction of the traverser from reaching the other opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.