MEMS capacitive sensor
US10547277B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2015 |
| Grant date | Jan 28, 2020 |
| Priority date | — |
| Expiry date | Dec 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F2200/03
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS capacitive sensor is disclosed. In an embodiment a MEMS capacitive sensor includes a capacitor having a variable capacitance, wherein the capacitor includes a backplate and a membrane being separated from each other by a variable distance, wherein the capacitor is arranged on a substrate, an output terminal configured to provide an output signal, wherein the output terminal is connected to the backplate, a bias voltage input terminal configured to apply a bias voltage, wherein the bias voltage input terminal is connected to the membrane and a supply voltage input terminal configured to apply a supply voltage, wherein the supply voltage input terminal is connected to the substrate, wherein the MEMS capacitive sensor is configured to generate a level of the output signal in dependence on the distance between the membrane and the backplate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.