Patent · US Active

Micromechanical sound transducer system and corresponding manufacturing method

US10547951B2 · kind B2 · utility

1Cited by

4References

16Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Ahmad Mansour · Weil der Stadt, DE
Daniel Pantel · Ditzingen, DE
Fabian Purkl · Gerlingen, DE
Kerrin Doessel · Stuttgart, DE
Thomas Buck · Tamm, DE
Thomas Northemann · Gerlingen, DE

Key dates

Filing date	Jan 4, 2018
Grant date	Jan 28, 2020
Priority date	—
Expiry date	Apr 23, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0118
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A micromechanical sound transducer system includes a substrate that includes (a) a cavity with a cavity edge area, (b) a front side, and (c) a rear side; a piezoelectric vibrating beam that is elastically suspended on the front side and that extends across the cavity; and, for the piezoelectric vibrating beam, a respective deflection limiting device that is on a front edge area of the respective vibrating beam and that is configured to limit a deflection of the respective vibrating beam to a limiting deflection by causing the respective front edge area of the respective vibrating beam to interact with the cavity edge area or an opposing front edge area of another vibrating beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.