Pressure sensor
US10548492B2 · kind B2 · utility
0Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2016 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Mar 5, 2037 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2562/0247
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A pressure sensor including a substrate having a first housing defining a gas-filled interior cavity arranged thereon. An elastic sealing element is attached to a free end of the first housing and generally covers an open end of the interior cavity for sealing the interior cavity with respect to an external environment. A portion of the elastic sealing element is configured to be moveable in response to a pressure acting thereon. A semiconductor die is arranged on the substrate and defines a pressure sensing diaphragm exposed to the gas occupying the interior cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.