Drying device and drying method using the same
US10549551B2 · kind B2 · utility
0Cited by
1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2015 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | May 8, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/40
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides a drying device and a drying method using the same. The drying device comprises a drying portion and a carrying portion, the carrying portion is used for carrying a substrate formed with a film layer to be dried, and the drying portion is arranged to face the film layer to be dried so as to dry the film layer to be dried.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.