Nanoscale optical tomography with cathodoluminescence spectroscopy
US10551330B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 22, 2015 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Aug 11, 2035 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.