Substrate support device
US10551651B2 · kind B2 · utility
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1References
19Claims
0Family size
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Key dates
| Filing date | Sep 12, 2017 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Jan 9, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133354
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A substrate support device is provided, including: a support rod movably arranged on a table; a first driving mechanism configured to control the support rod to move in a first direction; a support platform movably arranged on the support rod; a second driving mechanism configured to control the support platform to move in a second direction parallel to a lengthwise direction of the support rod; and a support pin movably arranged on the support platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.