Device for changing a surface shape of an optical element via electron irradiation

US10551747B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Walter Pauls · Wertingen, DE
• Florian Ahles · Aalen, DE
• Martin Weiser · Sinsheim, DE

Key dates

• Filing date: Aug 30, 2018
• Grant date: Feb 4, 2020
• Expiry date: Aug 30, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70958
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure relates to a device for changing a shape of a surface of an optical element via electron irradiation. The device includes an electron irradiation unit for radiating electrons onto the surface with a locally resolved energy dose distribution for the purpose of producing local material densifications in the optical element. Furthermore, the device includes a control unit for determining a locally resolved energy dose distribution from a predefined desired change of a surface shape of the optical element by optimization via a minimization of a merit function, in such a way that a difference between the desired change and an actual change of the surface shape of the optical element, the actual change being brought about on account of the predefinition determined, is minimized.