Purge load port
US10553467B2 · kind B2 · utility
2Cited by
9References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2015 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Jun 22, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A purge load port which is a load port devised with a purging plate and a purging module. The purging plate has inlet nozzles, outlet nozzles and recognizer; and the purging module has an inlet opening, an outlet opening, at least a temperature and humidity sensor, at least a flow meter and at least a pressure sensor. It makes the load port incapable of purging to provide the purging techniques after being devised with purging plate and purging modules, which solves the problem of controlling the cleanness by conventional load port, and thus effectively improves the yield of wafers in microchip fabrication.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.