Assessment method, and semiconductor device manufacturing method
US10553505B2 · kind B2 · utility
0Cited by
2References
15Claims
0Family size
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Key dates
| Filing date | Aug 10, 2019 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Aug 10, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
To easily assess a feedback capacitance of a semiconductor element. An assessment method of assessing a feedback capacitance of a semiconductor element is provided, the assessment method including:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.