Distillation method
US10556191B2 · kind B2 · utility
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2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2016 |
| Grant date | Feb 11, 2020 |
| Priority date | — |
| Expiry date | Aug 21, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/0231
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
By using the distillation device of the present application, energy loss occurring in a purification process of a solution including a waste stripper and a stripped photoresist resin used in a stripping process of a photoresist can be minimized and the installation cost of the distillation device can be reduced compared to the case in which dual distillation columns are used, thereby increasing the economic feasibility of a process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.