Dual-axis ultra-robust rotation rate sensor for automotive applications

US10557710B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Andreas Lassl · Ditzingen, DE
• Benjamin Schmidt · Stuttgart, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Mirko Hattass · Stuttgart, DE
• Thorsten Balslink · Kirchentellinsfurt, DE
• Christian Hoeppner · Munich, DE

Key dates

• Filing date: Jun 27, 2016
• Grant date: Feb 11, 2020
• Expiry date: Dec 9, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/574
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.