Method of inspecting electrode provided in gas sensor element
US10557817B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 4, 2018 |
| Grant date | Feb 11, 2020 |
| Priority date | — |
| Expiry date | Aug 3, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of inspecting an electrode provided in a gas sensor element includes the steps of: producing, in advance, a calibration curve representing a relation between an Au maldistribution degree defined based on a ratio of an area of a portion at which Au is exposed on a noble metal particle surface and calculated from a result of XPS or AES analysis on an inspection target electrode, and a predetermined alternative maldistribution degree index correlated with the Au maldistribution degree and acquired in a non-destructive manner from the gas sensor element heated to a predetermined temperature; acquiring a value of the alternative maldistribution degree index for the inspection target electrode of the gas sensor element while the gas sensor element is heated to the predetermined temperature; and determining whether the Au maldistribution degree satisfies a predetermined standard based on the calibration curve and the acquired inspection value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.