Substrate storage container
US10559484B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2016 |
| Grant date | Feb 11, 2020 |
| Priority date | — |
| Expiry date | Oct 3, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/66
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
[Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section.[Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2). In the substrate storage container (1), the inside of the container main body (2) is provided with a first holding section (12) having a first holding groove (12a) for holding a rear portion of the substrate (W), the inner side of the cover body (3) is provided with a second holding section (25) having a second holding groove (25a) for holding a front portion of the substrate (W), and at least the first holding groove (12a) of the first holding section (12) is configured from an alloy resin having a polycarbonate resin and a polybutylene terephthalate resin as main components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.