Methods of fabricating semiconductor memory devices
US10559571B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2018 |
| Grant date | Feb 11, 2020 |
| Priority date | — |
| Expiry date | Apr 28, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/482
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of fabricating a semiconductor memory device includes forming a bit line and a bit line capping pattern on the semiconductor substrate, forming a first spacer covering a sidewall of the bit line capping pattern and a sidewall of the bit line, forming a contact plug in contact with a sidewall of the first spacer and having a top surface that is lower than an upper end of the first spacer, removing an upper portion of the first spacer, forming a first sacrificial layer closing at least an entrance of the void, forming a second spacer covering the sidewall of the bit line capping pattern and having a bottom surface in contact with a top surface of the first spacer, and removing the first sacrificial layer. The bit line capping pattern is on the bit line. The contact plug includes a void exposed on the top surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.