Piezoelectric micromachined ultrasonic transducers using two bonded substrates
US10562069B2 · kind B2 · utility
2Cited by
1References
41Claims
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Key dates
| Filing date | Jan 13, 2017 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | Apr 9, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/88
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The PMUT consists of a flexural membrane that is piezoelectrically actuated. These membranes are formed on a first substrate that is bonded to a second substrate. The two substrates are separated by an air gap to allow the PMUT to vibrate. Several methods for joining the two substrates are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.