Imprint device
US10562223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2016 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | Oct 17, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2059/023
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An imprint device according to the present invention is provided with a supply device that supplies a plurality of condensable gases, which have different saturated vapor pressures, at a fixed ratio by a first condensable gas tank (6) and a control valve (6a) and a second condensable gas tank (6) and a control valve (7a) when a concave portion formed in a mold is transferred in an atmosphere of a condensable gas, which condenses at a temperature and a pressure in the concave portion, the concave portion being sealed by a resist layer that enters into the concave portion formed in the mold (3). The imprint device makes it possible to prevent resist filling failure caused by capillary condensation and to adjust pattern line width and shape by using the same mold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.