Membrane vacuum pump
US10563648B2 · kind B2 · utility
0Cited by
4References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 24, 2016 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | Apr 13, 2037 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B53/1075
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A membrane vacuum pump has at least one working space which is bounded by a membrane deformable to change the size of the working space and by a wall in which at least one inlet and at least one outlet are formed for a medium which is sucked into the working space which increases in size in so doing in a suction phase and is expelled via the outlet from the working space which decreases in size in so doing in a compression phase. The membrane vacuum pump furthermore has a controllable actuator unit for deforming the membrane by a contactless action on the membrane by means of electrical and/or magnetic fields.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.