Vacuum valve
US10563775B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2016 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | Oct 16, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a vacuum valve, and more particularly, to a vacuum valve including a valve housing with a blade, a main shaft, a vertical moving part, a horizontal moving part, a horizontal moving unit, and a main body bracket. Opening and closing guide holes are obliquely formed in both side surfaces such that cam rollers, having passed through the vertical moving guide grooves, are inserted into the grooves so as to guide the fore and aft movement of the blade according to the vertical movement of the horizontal moving unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.