Patent · US Active

Vacuum valve

US10563775B2 · kind B2 · utility

2Cited by
6References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 14, 2016
Grant dateFeb 18, 2020
Priority date
Expiry dateOct 16, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67126
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

The present invention relates to a vacuum valve, and more particularly, to a vacuum valve including a valve housing with a blade, a main shaft, a vertical moving part, a horizontal moving part, a horizontal moving unit, and a main body bracket. Opening and closing guide holes are obliquely formed in both side surfaces such that cam rollers, having passed through the vertical moving guide grooves, are inserted into the grooves so as to guide the fore and aft movement of the blade according to the vertical movement of the horizontal moving unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.