Force sensor
US10564059B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2016 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | Sep 11, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A force sensor according to the present invention is configured to detect at least one component among components of a force in each axis direction in an XYZ three-dimensional coordinate system and a moment around each axis, and includes: a support body arranged on an XY plane; a deformation body joined to the support body; and a detection circuit that outputs an electric signal indicating a force applied on the deformation body. The deformation body includes a first deformation portion having a first spring constant and a second deformation portion having a second spring constant different from the first spring constant, and the detection circuit outputs, in response to an applied force, a first electric signal corresponding to the deformation of the first deformation portion and a second electric signal corresponding to the deformation of the second deformation portion and determines whether the force sensor functions normally based on a change of a ratio between the first electric signal and the second electric signal, both corresponding to the applied force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.