Patent · US Active

Optical sensor and manufacturing method thereof

US10566476B2 · kind B2 · utility

0Cited by
2References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 22, 2017
Grant dateFeb 18, 2020
Priority date—
Expiry dateSep 22, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/30
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate; a light sensing region on the semiconductive substrate; a waveguide region configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion; and an interconnect region below the waveguide region, and the interconnect region being disposed above the light sensing region. The waveguide portion includes a first dielectric layer comprising a first refractive index and at least one second dielectric layer comprising a second refractive index, wherein the second refractive index is smaller than the first refractive index.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.