Heating element designs for phase-change material (PCM) radio frequency (RF) switches

US10566528B1 · kind B1 · utility

Assignee

• Newport Fab, LLC · US

Inventors

• Nabil El-Hinnawy · Irvine, US
• Gregory P. Slovin · Irvine, US
• Michael J. DeBar · Rochester, US
• Jefferson E. Rose · Hawthorne, US
• David J. Howard · Irvine, US

Key dates

• Filing date: Dec 14, 2018
• Grant date: Feb 18, 2020
• Expiry date: Dec 14, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N70/8828

Abstract

A radio frequency (RF) switch includes a heating element, a phase-change material (PCM) situated over the heating element, and PCM contacts situated over passive segments of the PCM. The heating element extends transverse to the PCM. The heating element can have a heater line underlying an active segment of the PCM. Alternatively, the heating element can have a split heater lines underlying an active segment of the PCM. The split heater lines increase an area of the active segment of the PCM and reduce a heater-to-PCM parasitic capacitance. A fan-out structure having fan-out metal can connect the heater line to a heater contact. The fan-out structure reduces heat generation outside the active segment of the PCM and reduces a heater contact-to-PCM parasitic capacitance. The fan-out structure can have dielectric segments interspersed between the fan-out metal to reduce dishing.