Fabrication of multilayered carbon MEMS devices

US10570010B1 · kind B1 · utility

Assignee

• National Technology & Engineering Solutions of Sandia, LLC · US

Inventors

• Patrick Sean Finnegan · Albuquerque, US
• Cody M. Washburn · Albuquerque, US
• David Bruce Burckel · Albuquerque, US
• David R. Wheeler · Albuquerque, US
• Timothy N. Lambert · Los Angeles, US
• Lee Taylor Massey · Livermore, US
• Jennifer Marie Strong · Rio Rancho, US
• Christopher Dyck · Albuquerque, US

Key dates

• Filing date: Jun 16, 2017
• Grant date: Feb 25, 2020
• Expiry date: Nov 14, 2037

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0198
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).