Sensor head for positioning sensor
US10571247B2 · kind B2 · utility
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17References
9Claims
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Assignee
Inventors
Key dates
| Filing date | Feb 14, 2019 |
| Grant date | Feb 25, 2020 |
| Priority date | — |
| Expiry date | Feb 14, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a sensor head capable of reduction in size while securing measurement accuracy. A sensor head includes a first case section and a second case section each having a substantially cylindrical shape and an end portion of which is open, and a third case section configured to connect the first case section and the second case section, a diffraction lens is disposed in the first case section, an objective lens is disposed in the second case section, and a mirror member is disposed in the third case section and configured to bend light entering the diffraction lens side toward the objective lens side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.