Accelerometers
US10571485B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2015 |
| Grant date | Feb 25, 2020 |
| Priority date | — |
| Expiry date | Jan 21, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass (204) from the null position under an applied acceleration using a pickoff amplifier (206) set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass (204) to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier (206) has its input (211) switched from Vcm to Vss, using a reference control circuit (209), so that drive amplifiers (210) can apply different voltages Vdd to the proof mass (204) and associated fixed electrodes (202).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.