Plasma apparatus and method for producing the same
US10573525B2 · kind B2 · utility
0Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 2013 |
| Grant date | Feb 25, 2020 |
| Priority date | — |
| Expiry date | Oct 6, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
[Object] To provide a plasma apparatus capable of igniting plasma reliably over a long period.[Solution] The apparatus includes a hollow structural body (11) having a hollow structure along an axis, a first electrode (12) disposed inside the hollow structural body (11), and a second electrode (14) having a structure that externally covers a plasma generation area (13) of the hollow structural body (11). The first electrode (12) has a deformation structure (12b) within the plasma generation area of the hollow structural body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.