Method for producing dense thin films by electrophoresis
US10577709B2 · kind B2 · utility
0Cited by
0References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2012 |
| Grant date | Mar 3, 2020 |
| Priority date | — |
| Expiry date | Nov 2, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Process for deposition of a dense thin film comprising at least one material Px on a substrate, in which:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.