Displacement sensor with segmented ring microresonator

US10578437B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Boris Taurel · Montbonnot-Saint-Martin, FR
• Salim Boutami · Grenoble, FR
• Laurent Duraffourg · Voiron, FR

Key dates

• Filing date: Jul 3, 2018
• Grant date: Mar 3, 2020
• Expiry date: Jul 3, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/29341
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical sensor includes an optical device including a microresonator, laid out to guide a light beam along a closed loop optical path, and an injection and/or extraction waveguide, optically coupled to the microresonator; a photodetector, arranged at the output of the injection and/or extraction waveguide; and an analysis device, receiving a signal supplied by the photodetector, and deducing therefrom information relative to a displacement. The microresonator is constituted of a plurality of elementary waveguides spaced apart from each other, and arranged one after the other according to a loop shaped layout. The optical sensor offers increased sensitivity to the measurement of nanometric displacements.