Calibration for fabry perot spectral measurements
US10578487B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2017 |
| Grant date | Mar 3, 2020 |
| Priority date | — |
| Expiry date | Sep 19, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for determining a calibrated spectral measurement includes a tunable Fabry-Perot etalon, a detector, and a processor. The tunable Fabry-Perot etalon has a settable gap. The detector measures light intensity transmitted through the tunable Fabry-Perot etalon. The processor is configured to determine the calibrated spectral measurement. The calibrated spectral measurement is based at least in part on a measurement set of detected light intensities for a plurality of settable gaps and a reconstruction matrix. The reconstruction matrix is based at least in part on calibration measurements using multiple source wavelengths and multiple settable gaps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.