Patent · US Active

Probe system and method for receiving a probe of a scanning probe microscope

US10578644B2 · kind B2 · utility

0Cited by

5References

24Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Christof Baur · Darmstadt, DE
Sylvio Ruhm · Dresden, DE
Gabriel Baralia · Darmstadt, DE
Christoph Pohl · Dresden, DE
Björn Harnath · Dresden, DE
Matthias Weber · Uttenreuth, DE

Key dates

Filing date	Dec 1, 2017
Grant date	Mar 3, 2020
Priority date	—
Expiry date	May 24, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01Q70/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.