Vertical probe array having a tiled membrane space transformer
US10578649B2 · kind B2 · utility
0Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2018 |
| Grant date | Mar 3, 2020 |
| Priority date | — |
| Expiry date | Aug 29, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Vertical probe heads having a space transformer laterally tiled into several sections are provided. This change relative to conventional approaches improves manufacturing yield. These probe heads can include metal ground planes, and in embodiments where the ground planes are provided as separate metal plates parallel to the guide plates, the metal plates can also be laterally tiled into several sections. Such tiling of metal plates improves manufacturing yield and alleviates thermal mismatch issues. Probes are not mechanically connected to the space transformer, which facilitates replacement of individual probes of an array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.