Compressive scanning spectroscopy
US10580614B2 · kind B2 · utility
2Cited by
36References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 7, 2017 |
| Grant date | Mar 3, 2020 |
| Priority date | — |
| Expiry date | Dec 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Mask-modulated spectra are incident to a sensor and are summed during a frame time. After the frame time, a compressed spectrum is read out based on the sum and decompressed to obtain spectra for some or all specimen locations. The mask-modulated spectrum that are summed are associated with different modulations produced by a common mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.