Error reduction in measurement of samples of materials
US10584958B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2018 |
| Grant date | Mar 10, 2020 |
| Priority date | — |
| Expiry date | Oct 19, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Operations related to error reduction in measurement of samples of materials may include operations in which a first distance measurement may be obtained between a first probe and a first surface of a sample at a first time mark. Additionally, the operations may include obtaining a second distance measurement between a second probe and a second surface of the sample at a second time mark. Operations may further include obtaining a third distance measurement between the first probe and the first surface of a sample at a third time mark, and determining a fourth distance measurement between the first probe and the first surface of the sample at the second time mark. In addition, the operations may include determining a thickness of the sample, including an error term due to vibration of the sample. The error term may be discounted from the thickness of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.