Patent · US Active

Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support

US10585074B2 · kind B2 · utility

0Cited by

2References

13Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Bruno FAIN · Grenoble, FR
Carine Ladner · Grenoble, FR
Thomas Alava · Grenoble, FR

Key dates

Filing date	Jan 17, 2018
Grant date	Mar 10, 2020
Priority date	—
Expiry date	Mar 30, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0133
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Method of fabricating a microelectromechanical structure et comprising two elements suspended from a support, a cavity made in the support, said cavity having two different depths, including:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.