3-axis angular accelerometer
US10585111B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2017 |
| Grant date | Mar 10, 2020 |
| Priority date | — |
| Expiry date | Jan 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N10/13
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.