Method and device for characterizing an electron beam
US10586683B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 22, 2017 |
| Grant date | Mar 10, 2020 |
| Priority date | — |
| Expiry date | Jun 22, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P10/25
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.