Alignment detection method and display device
US10591760B2 · kind B2 · utility
Assignees
Inventor
Key dates
| Filing date | Nov 14, 2018 |
| Grant date | Mar 17, 2020 |
| Priority date | — |
| Expiry date | Nov 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54426
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alignment detection method includes: establishing a coordinate system; providing at least one group of a first and second mark regions arranged on a first and second substrates respectively, the first and second mark regions being arranged opposite to each other so as to form at least two groups of first and second alignment marks; detecting an overlap level between an orthogonal projection of each of the first alignment marks onto the first substrate and that of the second alignment marks onto the second substrate, selecting a group of the first and second alignment marks having the highest overlap level, and acquiring, in the coordinate system, coordinate values of the first and second alignment marks in the group having the highest overlap level; and comparing the coordinate values with a threshold, so as to determine alignment accuracy between the first and second substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.