On-chip optical phased array using a serial grating antenna design
US10591802B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2018 |
| Grant date | Mar 17, 2020 |
| Priority date | — |
| Expiry date | Jan 18, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/50
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An on-chip optical phased array includes an array of photonic antenna units connected in series by photonic waveguides and arranged in a two-dimensional array to produce complex still and scanning optical patterns through optical interference effect. Each antenna unit includes an output photonic antenna (e.g. grating antenna), and a waveguide phase shifter for adjusting the optical phase of the optical beam output by the antenna unit. The grating antenna and the waveguide phase shifter are formed in the same optical wave guiding layer which includes a core layer between two cladding layers. The grating antennas may be a shallow-etched structure or a deep-etched edge-modulated grating. The optical phased array, including the array of photonic antenna units and the electrodes that connect and provide electrical power to them, can be made on a single chip of silicon using complementary metal-oxide-semiconductor (CMOS) or compatible fabrication processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.