Nadic anhydride polymers and photosensitive compositions derived therefrom
US10591818B2 · kind B2 · utility
7Cited by
8References
20Claims
0Family size
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Key dates
| Filing date | Jul 28, 2017 |
| Grant date | Mar 17, 2020 |
| Priority date | — |
| Expiry date | Jul 28, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/38
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Various vinyl addition polymers of nadic anhydride are disclosed. Examples of such polymers include copolymers and terpolymers of nadic anhydride with a wide variety of norbornene-type monomers. The nadic anhydride polymers are found to be useful in forming a wide variety of photosensitive compositions, both positive and negative, which are capable of forming high resolution imagable films exhibiting excellent dielectric properties (low-k) and thermal properties, and thus are useful in the fabrication of a variety of microelectronic and optoelectronic devices, among others.
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