Patent · US Active

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

US10593509B2 · kind B2 · utility

0Cited by

0References

22Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Benjamin John Cook · Munich, DE
Dieter Winkler · Munich, DE

Key dates

Filing date	Jul 17, 2018
Grant date	Mar 17, 2020
Priority date	—
Expiry date	Jul 17, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2448
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A multi-beam charged particle beam device is described. The multi-beam charged particle beam device includes a charged particle source configured to emit a primary charged particle beam; an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam; and a blanking device, the blanking device includes at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet; and a shield assembly having a first shielding element partially or fully surrounding the first blanking deflector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.