Pressure level sensing device and a method for sensing pressure
US10598557B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 12, 2016 |
| Grant date | Mar 24, 2020 |
| Priority date | — |
| Expiry date | Nov 26, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensing device that includes a pressure sensing element that is of microscopic scale and has a pressure level dependent thermal parameter; a signal source that is configured to supply an input electrical signal to the pressure sensing element; and a monitor that is configured to (a) measure electrical output signals generated by the pressure sensing element as a result of the supply of the input electrical signal and (b) estimate a pressure level applied on the pressure sensing element based on the electrical output signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.