Sensor device and a method of detecting a component in gas
US10598590B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2019 |
| Grant date | Mar 24, 2020 |
| Priority date | — |
| Expiry date | Jan 8, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor device comprising a planar substrate defining a substrate plane and a waveguide for guiding an electromagnetic wave. The waveguide extends in a length direction in a waveguide plane parallel to the substrate plane and has a width and a height wherein the width to height ratio is more than 5. The height of the waveguide is less than the wavelength of the electromagnetic wave. The waveguide is supported on the substrate by a support structure extending from the substrate to the waveguide, along the length direction of the waveguide, having a width which is smaller than the width of the waveguide. The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.