Patent · US Active

Out-of plane-accelerometer

US10598689B2 · kind B2 · utility

4Cited by
4References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 11, 2017
Grant dateMar 24, 2020
Priority date—
Expiry dateApr 16, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P2015/0828
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Accelerometer including a seismic mass in a plane and a first capacitor plate and a second capacitor plate arranged parallel to the plane. The seismic mass is arranged in between the first capacitor plate and the second capacitor plate. The first capacitor plate and the second capacitor plate are configured to detect movements of the seismic mass out of the plane. A pillar extending from the first capacitor plate to the second capacitor plate through a cut-out in the seismic mass for stiffening the accelerometer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.