Method for manufacturing MEMS devices and nano devices with varying degrees of hydrophobicity and hydrophilicity in a composite photoimageable dry film
US10599034B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Aug 21, 2017 |
| Grant date | Mar 24, 2020 |
| Priority date | — |
| Expiry date | Dec 29, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0385
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A three-dimensional (“3D”) structure for handling fluids, a fluid handling device containing the 3D structure, and a method of making the 3D structure. The method includes providing a composite photoresist material that includes: (a) a first layer devoid of a hydrophobicity agent and (b) at least a second layer comprising the hydrophobicity agent. The composite photoresist material is devoid of an adhesion promotion layer between layers of the composite photoresist material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.