Dynamic care areas for defect detection
US10600175B2 · kind B2 · utility
2Cited by
2References
17Claims
0Family size
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Key dates
| Filing date | Dec 29, 2017 |
| Grant date | Mar 24, 2020 |
| Priority date | — |
| Expiry date | Mar 13, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods of a two-pass inspection methodology that dynamically creates micro care areas for inspection of repeater defects. Micro care areas can be formed around each location of a repeater defect. After inspection, additional repeater defects in the micro care areas can be identified. Attributes of the repeater defects can be compared and any repeater defects with attributes that deviate from an expected group attribute distribution can be classified as nuisance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.