Film bulk acoustic resonator with spurious resonance suppression
US10601391B2 · kind B2 · utility
9Cited by
14References
23Claims
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Key dates
| Filing date | Oct 20, 2017 |
| Grant date | Mar 24, 2020 |
| Priority date | — |
| Expiry date | Sep 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/132
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Devices and processes for preparing devices are described for reducing resonance of spurious waves in a bulk acoustic resonator. A first electrode is coupled to a first side of a piezoelectric layer and a second electrode is coupled to a second side of the piezoelectric layer. The piezoelectric layer is configured to resonate in response to an electrical signal applied between the first electrode and the second electrode. Perforations in the first electrode, the piezoelectric layer and/or the second electrode, and/or posts or beams supporting the second electrode, reduce resonance of spurious waves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.