Solidly-mounted transversely-excited film bulk acoustic resonator
US10601392B2 · kind B2 · utility
217Cited by
13References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2019 |
| Grant date | Mar 24, 2020 |
| Priority date | — |
| Expiry date | Jun 11, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/025
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a substrate and a single-crystal piezoelectric plate having parallel front and back surfaces. An acoustic Bragg reflector is sandwiched between a surface of the substrate and the back surface of the single-crystal piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface. The IDT is configured to excite shear acoustic waves in the piezoelectric plate in response to a radio frequency signal applied to the IDT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.